Use Beam Deflection For Position
This option is available if an imaging interface is supported by the hardware interface (see the ImageInterfacePresent and ImageInterfaceType parameters in PROBEWIN.INI file). If this option is unchecked then normal stage motion is used to position the sample for acquisition. If this option is checked, then the program will utilize beam deflection for positioning the sample (beam position) for acquisition. This option affects only unknown and wavescan position samples (not standards).
This option is primarily intended for situations where very small beam diameters (low overvoltage) are used for precise positioning and acquisition at scales finer than the stage mechanism is capable of. Note that care must be taken to digitize positions that are all within the range of the current beam scan parameters and that a high enough magnification is utilized so that no spectrometer defocusing occurs.
For JEOL 8900/8200 instruments there is an option to suppress the stage backlash during the acquisition using beam deflection. This is for extremely high resolution analysis of single samples where it is desired that the stage not move at all.